PL 55 (A. I. Virtasen aukio 1)
00014 Helsingin Yliopisto

I’m currently Associate Professor in the field of Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALEt). I have been involved into ALD since 1997 with main interest in development novel ALD precursors and processes focusing on ALD materials chemistry, requirements from small-scale R&D experiments to industrial ALD process.


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