I’m currently Associate Professor in the field of Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALEt). I have been involved into ALD since 1997 with main interest in development novel ALD precursors and processes focusing on ALD materials chemistry, requirements from small-scale R&D experiments to industrial ALD process.
Field of science
P.O 55 (A. I. Virtasen aukio 1)
00014 University of Helsinki