Field of science
Address
P.O 55 (A. I. Virtasen aukio 1)
00014 University of Helsinki

I’m currently Associate Professor in the field of Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALEt). I have been involved into ALD since 1997 with main interest in development novel ALD precursors and processes focusing on ALD materials chemistry, requirements from small-scale R&D experiments to industrial ALD process.

Recent notifications