Thin film analysis

ALD center Finland has a comprehensive set of thin film characterisation equipment. The methods/instruments listed here can also be used to analyze thin films deposited with other methods besides ALD.

  • electron microscopy, scanning probe microscopy
  • ion beam techniques (ERDA, RBS, PIXE)
  • X-ray diffraction (XRD), refection (XRR), and absorption spectroscopy (XAS)
  • ellipsometry, UV-vis-FTIR spectroscopy
  • electrical characterisation