ALD center Finland has a comprehensive set of thin film characterisation equipment. The methods/instruments listed here can also be used to analyze thin films deposited with other methods besides ALD.
- electron microscopy, scanning probe microscopy
- ion beam techniques (ERDA, RBS, PIXE)
- X-ray diffraction (XRD), refection (XRR), and absorption spectroscopy (XAS)
- ellipsometry, UV-vis-FTIR spectroscopy
- electrical characterisation