Mechanistic studies

A unique UHV cluster tool was installed in the spring of 2021. This tool connects in vacuo an ALD/ALEt reactor to surface analytical techniques such as XPS, UPS, Auger, LEED, ISS, TPD. The same methods can also be used for other surface science studies like those related to heterogeneous catalysis.

In situ characterisation of ALD processes can also be done with QCM and QMS and ellipsometry.